Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems
نویسندگان
چکیده
منابع مشابه
Design and Simulation of Piezoelectric MEMS Cantilever
In this paper, a Micro – Electrical Mechanical System (MEMS) energy harvester is developed, using the phenomenon of Piezoelectricity. Zinc Oxide (ZnO) was chosen as the piezoelectric material. A multi – d31 mode cantilever design was used with varying dimensions of cantilever, to form an array. The individual cantilevers can be either connected in series or parallel to achieve different output ...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2017
ISSN: 2072-666X
DOI: 10.3390/mi8100311